Heuristic tabu search scheduling algorithm for wet-etching systems in semiconductor wafer fabrications

Keyphrases

• Copyright 33%
• Heuristic Algorithms 66%
• High Technology 33%
• Initial Feasible Solution 33%
• Material Handling Robots 33%
• Nonlinear Programming 33%
• Overall Efficiency 33%
• Problem Domain 33%
• Process Module 33%
• Processing Time 33%
• Scheduling Algorithm 100%
• Scheduling Problem 33%
• Scheduling Solutions 33%
• Semiconductor Wafer 33%
• Semiconductor Wafer Fabrication 100%
• Simulation Experiment 33%
• Tabu Search 100%
• Time Constraints 33%
• Wafer 33%
• Wafer Processing 33%
• Wet Etch Process 33%
• Wet Etching 100%

Computer Science

• Feasible Solution 33%
• Heuristic Algorithm 66%
• High Technology 33%
• Material Handling 33%
• Nonlinear Programming 33%
• Problem Domain 33%
• Processing Time 33%
• Programming Model 33%
• Robot 33%
• Scheduling Algorithm 100%
• Scheduling Problem 33%
• Simulation Experiment 33%
• Tabu Search 33%
• Tabu Search Heuristic 100%
• Time Constraint 33%

Material Science

• Wet Etching 100%