Keyphrases
Scheduling Algorithm
100%
Semiconductor Wafer Fabrication
100%
Wet Etching
100%
Tabu Search
100%
Heuristic Algorithms
66%
Copyright
33%
High Technology
33%
Time Constraints
33%
Scheduling Problem
33%
Simulation Experiment
33%
Problem Domain
33%
Process Module
33%
Wafer
33%
Processing Time
33%
Overall Efficiency
33%
Initial Feasible Solution
33%
Material Handling Robots
33%
Scheduling Solutions
33%
Semiconductor Wafer
33%
Wafer Processing
33%
Nonlinear Programming
33%
Wet Etch Process
33%
Computer Science
Scheduling Algorithm
100%
Tabu Search Heuristic
100%
Heuristic Algorithm
66%
Scheduling Problem
33%
Nonlinear Programming
33%
Processing Time
33%
Programming Model
33%
Time Constraint
33%
Feasible Solution
33%
Simulation Experiment
33%
Problem Domain
33%
Robot
33%
High Technology
33%
Material Handling
33%
Tabu Search
33%