Heuristic tabu search scheduling algorithm for wet-etching systems in semiconductor wafer fabrications

Engineering & Materials Science

• Wet etching 87%
• Tabu search 72%
• Scheduling algorithms 61%
• Semiconductor materials 55%
• Fabrication 46%
• Heuristic algorithms 41%
• Scheduling 28%
• Materials handling 24%
• Nonlinear programming 22%
• Throughput 14%
• Robots 13%
• Experiments 7%

Medicine & Life Sciences

• Taboo 92%
• Semiconductors 89%
• Heuristics 80%
• Nonlinear Dynamics 13%
• Efficiency 11%
• Equipment and Supplies 6%

Chemical Compounds

• Material Handling 100%
• Semiconductor 47%
• Simulation 39%
• Time 22%