Dynamic scheduling of photolithography process based on Kohonen neural network

Keyphrases

• Area Control 33%
• Best Combination 33%
• Bottleneck Process 33%
• Closed-loop 33%
• Combination Rule 66%
• Copyright 33%
• Dynamic Dispatching 33%
• Dynamic Scheduling 100%
• Dynamic Scheduling Algorithm 33%
• Fabrication System 33%
• Kohonen Neural Network 100%
• Learning Algorithm 33%
• Neural Network 33%
• Photolithography 100%
• Photolithography Process 100%
• Process-based 100%
• Real-time Scheduling 33%
• Release Policy 66%
• Sample Learning 33%
• Scheduling Framework 66%
• Semiconductor Fabrication 33%
• Semiconductor Industry 33%
• Semiconductor Manufacturing System 33%
• Semiconductor Wafer Fabrication System 33%
• Semiconductors 33%
• Simulation Experiment 33%

Engineering

• Bottleneck Process 25%
• Closed Loop 25%
• Control Area 25%
• Gas Fuel Manufacture 25%
• Learning Algorithm 25%
• Open Loop 25%
• Optical Lithography 100%
• Scheduling Framework 50%
• Semiconductor Fabrication 25%
• Semiconductor Manufacturing 25%
• Simulation Experiment 25%

Chemical Engineering

• Neural Network 100%