Abstract
Cluster tools are widely used in the industrial production process, such as semiconductor wafers, printing circuit board and other fields. In this paper, the scheduling problem of cluster tools with multi-type wafers is studied, including robot handling jobs sequencing and wafer processing sequencing. Based on the detailed analysis of the operations in the problem, there are the processing time window constraints, robot available constraints, processing capacity constraints. Then, due to the complexity in the general conditions, a case with four different wafers (including one for each type in a cycle) is considered. The applied model was solved by the third-party library Gurobi in PyCharm. Copyright © 2022 The authors and IOS Press.
| Original language | English |
|---|---|
| Title of host publication | Applied mathematics, modeling and computer simulation: Proceedings of AMMCS 2021 |
| Editors | Chi-Hua CHEN |
| Place of Publication | Amsterdam, Netherlands |
| Publisher | IOS Press BV |
| Pages | 371-379 |
| ISBN (Electronic) | 9781643682549 |
| ISBN (Print) | 9781643682556 |
| DOIs | |
| Publication status | Published - 2022 |
Citation
Li, X., & Tian, J. (2022). Cyclic scheduling of single-arm cluster tools with multiple wafer types: A case study. In C.-H. Chen (Ed.), Applied mathematics, modeling and computer simulation: Proceedings of AMMCS 2021 (pp. 371-379). IOS Press BV. https://doi.org/10.3233/ATDE220037Keywords
- Single-arm cluster tool
- Multiple types of wafer
- Shared processing chambers
- Time window
- Circle scheduling